Semitron® MPR1000: The Next‑Generation Material for Semiconductor Plasma Processing

Semitron® MPR1000 Overview

Developed by Mitsubishi Chemical Advanced Materials, Semitron® MPR1000 is a high‑performance engineering polymer engineered for semiconductor plasma chambers. The acronym MPR—Maximum Plasma Resistance—underscores its superior durability in harsh, oxygen‑rich environments where conventional ceramics and quartz are costly or fragile.

Key Advantages

• Exceptional heat resistance up to 260 °C
• Ultra‑low erosion: 0.44 % weight loss at 1 kW plasma versus 7.98 % for PEEK, 6.86 % for Torlon®, and 6.15 % for Vespel®
• Outstanding chemical stability—25× longer life in ozone compared to polyimides like Vespel®
• Minimal ionic content and out‑gassing, reducing contamination in vacuum chambers
• Excellent chip and wear resistance, ensuring reliable performance over extended cycles
• Precision machinability for fasteners, washers, pins, and custom components
• Cost‑effective: delivers the highest performance at the lowest material cost among plastics used in plasma processing

Common Applications

Parts produced from MPR1000 include screws, hex nuts, flat washers, clamp rings, trench rings, pins, shower heads, centering pins, focus rings, insulators, vacuum pads, wafer guides, and a wide array of custom parts tailored to semiconductor fabrication needs.

Understanding Plasma in Semiconductor Processing

Plasma—an ionized gas—serves as the “fourth state of matter” and is central to wafer cleaning, surface activation, deposition, and etching. In industrial settings, a vacuum chamber is filled with low‑pressure gases (oxygen, nitrogen, argon, hydrogen, CF₄) and energized by RF power to generate the plasma. The precise mix of gas, pressure, and power controls the treatment outcome.

Why Semitron® MPR1000 Excels in Plasma Environments

Unlike quartz, ceramics, Torlon®, Vespel®, or PEEK, MPR1000 maintains structural integrity under intense plasma exposure. Its low erosion rate and chemical resilience translate to fewer maintenance cycles and longer device lifespans.

Cleanliness and Contamination Control

With a low ionic material content and minimal out‑gassing, MPR1000 reduces particulate and molecular contaminants that could otherwise compromise wafer quality.

Cost‑Effectiveness

When factoring in material cost, durability, and reduced downtime, MPR1000 offers the best value for semiconductor manufacturers.

For prints, parts, or technical support, contact Craftech Industries, Inc. in Hudson, NY—your trusted partner in Semitron® MPR1000 manufacturing.